Spectroscopic detection of silylene in the infrared multiphoton decomposition of silane
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.93897
Reference26 articles.
1. Reaction mechanisms of the radio frequency glow discharged deposition process in silane-helium
2. Mass spectrometry of a silane glow discharge during plasma deposition of a-Si: H films
3. Ionic species in a silane plasma
4. Silane dissociation mechanisms and thin film formation in a low pressure multipole dc discharge
5. Growth morphology and defects in plasma-deposited a-Si:H films
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