Sub‐30 nm lithography in a negative electron beam resist with a vacuum scanning tunneling microscope
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.104841
Reference16 articles.
1. Surface Studies by Scanning Tunneling Microscopy
2. Point source for ions and electrons
3. Low‐voltage electron beam lithography with a scanning tunneling microscope
4. Lithographic studies of an e‐beam resist in a vacuum scanning tunneling microscope
5. Lithography with the scanning tunneling microscope
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