Towards alternative 3D nanofabrication in macroscopic working volumes
Author:
Funder
Deutsche Forschungsgemeinschaft
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Link
http://iopscience.iop.org/article/10.1088/1361-6501/aadb57/pdf
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1. Comparison between e-beam direct write and immersion lithography for 20-nm node
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