Anion reactions in silane plasma
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1459758
Reference14 articles.
1. Model of particle growth in silane discharges
2. Time‐resolved measurements of highly polymerized negative ions in radio frequency silane plasma deposition experiments
3. From molecules to particles in silane plasmas
4. Partial-depth modulation study of anions and neutrals in low-pressure silane plasmas
5. Dust Particle Diagnostics in Rf Plasma Deposition of Silicon and Silicon Oxide Films (Invited)
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