Model of particle growth in silane discharges
Author:
Publisher
American Physical Society (APS)
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevE.62.2690/fulltext
Reference33 articles.
1. Sheath structure around particles in low‐pressure discharges
2. Nanoparticle deposition in hydrogenated amorphous silicon films during rf plasma deposition
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4. Small particle growth in silane radio-frequency discharges
5. In situ ellipsometric study of the influence of powder formation on the initial growth of glow discharge a−Si:H
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