White light emission from silicon oxycarbide films prepared by using atmospheric pressure microplasma jet
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3080129
Reference17 articles.
1. Atmospheric pressure microplasma jet as a depositing tool
2. Localized and ultrahigh-rate etching of silicon wafers using atmospheric-pressure microplasma jets
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4. Protein destruction by a helium atmospheric pressure glow discharge: Capability and mechanisms
5. Intense blue–white luminescence from carbon-doped silicon-rich silicon oxide
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