Localized and ultrahigh-rate etching of silicon wafers using atmospheric-pressure microplasma jets
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1630375
Reference20 articles.
1. Microhollow cathode discharges
2. Microdischarge devices fabricated in silicon
3. Emission of excimer radiation from direct current, high-pressure hollow cathode discharges
4. Continuous-wave emission in the ultraviolet from diatomic excimers in a microdischarge
5. Spatiotemporal behaviors of excited Xe atoms in unit discharge cell of ac-type plasma display panel studied by laser spectroscopic microscopy
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