Improvement of the electrical performance in metal-induced laterally crystallized polycrystalline silicon thin-film transistors by crystal filtering
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2400108
Reference7 articles.
1. Crystallization of LPCVD Silicon Films by Low Temperature Annealing
2. A systematic study and optimization of parameters affecting grain size and surface roughness in excimer laser annealed polysilicon thin films
3. Low temperature poly-Si thin-film transistor fabrication by metal-induced lateral crystallization
4. Gate current and oxide reliability in p/sup +/ poly MOS capacitors with poly-Si and poly-Ge/sub 0.3/Si/sub 0.7/ gate material
5. The Effects of Crystal Filtering on Growth of Silicon Grains in Metal-Induced Lateral Crystallization
Cited by 14 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Crystal Filter-Mediated Grain Alignment in Poly-Si Thin-Film Transistors for Next-Generation Ferroelectric Memory Devices;IEEE Electron Device Letters;2024-09
2. Effect of Ultrathin Silicon Oxide Film for Enhanced Performance and Reliability of Metal-Induced Laterally Crystallized Thin-Film Transistors Using Silicon Nitride as a Gate Dielectric;ECS Journal of Solid State Science and Technology;2016
3. Polycrystalline silicon multi-functional memory (MFM) with a recessed channel structure;Journal of the Korean Physical Society;2013-09
4. Effect of Ni silicide density on electrical performance of silicide-induced crystallized polycrystalline silicon thin-film transistors;Electronic Materials Letters;2012-08
5. High performance low temperature polycrystalline Si thin-film transistors fabricated by silicide seed-induced lateral crystallization;Electronic Materials Letters;2012-06
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3