Resilience of ultra-thin oxynitride films to percolative wear-out and reliability implications for high-κ stacks at low voltage stress

Author:

Raghavan Nagarajan,Padovani Andrea,Li Xiang,Wu Xing,Lip Lo Vui,Bosman Michel,Larcher Luca,Leong Pey Kin

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Cited by 6 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

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4. Dielectric Breakdown Processes;Resistive Switching;2016-01-01

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