Fabrication of metallic air bridges using multiple-dose electron beam lithography
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2204833
Reference10 articles.
1. Low-stiffness silicon cantilevers with integrated heaters and piezoresistive sensors for high-density AFM thermomechanical data storage
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4. Micromechanical Membrane Switches on Silicon
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