Fabrication of airbridges with gradient exposure
Author:
Affiliation:
1. National Laboratory of Solid State Microstructures, School of Physics, Nanjing University, Nanjing 210093, China
2. Hefei National Laboratory, Hefei 230088, China
3. Shishan Laboratory, Suzhou Campus of Nanjing University, Suzhou 215000, China
Abstract
Funder
Special Project for Research and Development in Key areas of Guangdong Province
National Natural Science Foundation of China
Natural Science Foundation of Jiangsu Province
Innovation Program for Quantum Science and Technology
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
https://aip.scitation.org/doi/pdf/10.1063/5.0102555
Reference27 articles.
1. Radiation loss from open coplanar waveguide discontinuities
2. Controlling the Spontaneous Emission of a Superconducting Transmon Qubit
3. Coplanar Waveguide Circuits, Components, and Systems
4. Excitation of coupled slotline mode in finite-ground CPW with unequal ground-plane widths
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