Affiliation:
1. Institute for Quantum Computing, Department of Physics and Astronomy, and Waterloo Institute for Nanotechnology, University of Waterloo, Waterloo, Ontario N2L 3G1, Canada
Abstract
In superconducting quantum devices, air bridges enable increased circuit complexity and density, and mitigate the risk of microwave loss arising from mode mixing. We implement aluminum air bridges using a simple process based on single-step electron-beam gradient exposure. The resulting bridges have sizes ranging from 20 µm to 100 µm, with a yield exceeding 99% for lengths up to 36 µm. When used to connect ground planes in coplanar waveguide resonators, the induced loss contributed to the system is negligible, corresponding to a loss per bridge less than [Formula: see text]. The bridge process is compatible with Josephson junctions and allows for the simultaneous creation of low loss bandages between superconducting layers.
Funder
Natural Sciences and Engineering Research Council of Canada
Canada Foundation for Innovation
CMC Microsystems
Subject
Physics and Astronomy (miscellaneous)
Cited by
2 articles.
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