Author:
Rhee Kee Woo,Peckerar Martin C.
Subject
Physics and Astronomy (miscellaneous)
Cited by
2 articles.
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1. Feature contrast in dose-equalization schemes used for electron-beam proximity control;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1996-11
2. Nanoscale Fabrication;Ultimate Limits of Fabrication and Measurement;1995