Author:
Antoniadis D. A.,Lin A. M.,Dutton R. W.
Subject
Physics and Astronomy (miscellaneous)
Cited by
97 articles.
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4. Effect of stacking fault in silicon induced by nanoindentation with MD simulation;Materials Science in Semiconductor Processing;2015-02
5. Dopant Diffusion;Handbook of Semiconductor Manufacturing Technology, Second Edition;2007-07-09