On phosphorus diffusion in silicon under oxidizing atmospheres
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference7 articles.
1. Studies of anomalous diffusion of impurities in silicon
2. Experimental-Condition Dependence of Phosphorus Diffusivity in Silicon
3. Redistribution of Diffused Boron in Silicon by Thermal Oxidation
4. Carrier mobilities in silicon empirically related to doping and field
5. Detailed analysis of thin phosphorus-diffused layers in p-type silicon
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