Electron transport properties and collision cross sections in C2F4
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1433189
Reference23 articles.
1. Electron transport, ionization, and attachment coefficients in C2F4 and C2F4/Ar mixtures
2. New radical control method for high-performance dielectric etching with nonperfluorocompound gas chemistries in ultrahigh-frequency plasma
3. Measurement of electron-transport coefficients in O by a double-shutter drift-tube method
4. Evolution equation and transport coefficients defined by arrival-time spectra of swarms
5. The development of electron avalanches in argon at high E/N values. II. Boltzmann equation analysis
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