Dissociative adsorption of silane on the Si(100)-(2×1) surface
Author:
Publisher
AIP Publishing
Subject
Physical and Theoretical Chemistry,General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.477986
Reference36 articles.
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4. The Kinetics of Silicon Deposition on Silicon by Pyrolysis of Silane
5. The surface chemistry of the thermal cracking of silane on silicon (111)
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