Interlayer transition zones in Mo/Si superlattices-Reference-Cited by-同舟云学术

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Interlayer transition zones in Mo/Si superlattices

Published:2002-08 Issue:3 Volume:92 Page:1216-1220
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Yulin S.,Feigl T.,Kuhlmann T.,Kaiser N.,Fedorenko A. I.,Kondratenko V. V.,Poltseva O. V.,Sevryukova V. A.,Zolotaryov A. Yu.,Zubarev E. N.

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.1487919

Reference18 articles.

1. Mo/Si multilayer coating technology for EUVL: coating uniformity and time stability

2. High‐resolution electron microscopy study of x‐ray multilayer structures

3. Interfacial reactions on annealing molybdenum‐silicon multilayers

4. Thermally induced structural modification of Mo‐Si multilayers

5. Interface imperfections in metal/Si multilayers

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3. Comparative Study on Microstructure of Mo/Si Multilayers Deposited on Large Curved Mirror with and without the Shadow Mask;Micromachines;2023-02-24

4. Investigation of physical properties of Si crystallites in W/Si multilayers;Journal of Applied Crystallography;2022-10-27

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