<title>Mo/Si multilayer coating technology for EUVL: coating uniformity and time stability

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Mo/Si multilayer coating technology for EUVL: coating uniformity and time stability

Published:2000-11-08 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
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Author:

Louis Eric,Yakshin Andrey E.,Goerts Peter C.,Oestreich Sebastian,Maas Edward L. G.,Kessels M. J. H.,Schmitz Detlef,Scholze Frank,Ulm Gerhard,Muellender Stefan,Haidl Markus,Bijkerk Fred

Publisher

SPIE

Cited by 9 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. 极紫外光源用大口径Mo/Si多层膜厚度控制与热稳定性研究;Chinese Journal of Lasers;2024

2. Comparative Study on Microstructure of Mo/Si Multilayers Deposited on Large Curved Mirror with and without the Shadow Mask;Micromachines;2023-02-24

3. Surface structure determination by x-ray standing waves at a free-electron laser;New Journal of Physics;2019-03-28

4. Mechanism and model of atomic hydrogen cleaning for different types of carbon contamination on extreme ultraviolet multilayers;Thin Solid Films;2016-08

5. Nanometer interface and materials control for multilayer EUV-optical applications;Progress in Surface Science;2011-12

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