Growth and characteristics of tantalum oxide thin films deposited using thermionic vacuum arc technology
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3503278
Reference26 articles.
1. Antireflecting coating from Ta2O5 and SiO2 multilayer films
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3. Reactively sputtered tantalum pentoxide thin films for integrated capacitors
4. Evanescent field Sensors Based on Tantalum Pentoxide Waveguides – A Review
5. Optical and durability properties of infrared transmitting thin films
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3. NANOSTRUCTURED Ti-C THIN FILMS DEPOSITED BY THERMIONIC VACUUM ARC (TVA) TECHNOLOGY;Annals of the Academy of Romanian Scientists Series on Physics and Chemistry;2022
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