Activation volume for antimony diffusion in silicon and implications for strained films
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.124561
Reference19 articles.
1. Effects of hydrostatic pressure on dopant diffusion in silicon
2. Thermodynamics of diffusion under pressure and stress: Relation to point defect mechanisms
3. Nonhydrostatic Stress Effects on Boron Diffusion in SI
4. Activation volume for boron diffusion in silicon and implications for strained films
5. The interstitial fraction of diffusivity of common dopants in Si
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