Characteristics of altered layers formed by sputtering with a massive molecular ion containing diverse elements with large mass differences
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2786906
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1. The Magic of Cluster SIMS
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5. Impact energy dependence of SF5+ ion beam damage of poly(methyl methacrylate) studied by time-of-flight secondary ion mass spectrometry
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1. Characteristics of a Metal-Cluster-Complex Ion Beam and Its Application to Secondary Ion Mass Spectrometry (SIMS);Hyomen Kagaku;2010
2. Ion Beam Generation from an Electrolyte Solution Containing Polyatomic Cations and Anions for Secondary Ion Mass Spectrometry;Japanese Journal of Applied Physics;2009-12-21
3. Metal cluster complex primary ion beam source for secondary ion mass spectrometry (SIMS);Vacuum;2009-12
4. Production and Applications of Metal-cluster-complex Ion Beams;Journal of the Vacuum Society of Japan;2009
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