Thermal nitridation of silicon in a cluster tool
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.106651
Reference15 articles.
1. Very Thin Silicon Nitride Films Grown by Direct Thermal Reaction with Nitrogen
2. Thermally grown silicon nitride films for high‐performance MNS devices
3. Low-voltage alterable EAROM cells with nitride-barrier avalanche-injection MIS (NAMIS)
4. Nitridation of Silicon and Oxidized‐Silicon
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