Microstructure and Mechanical Properties of ZrCuSiN Coatings Deposited by a Single Alloy Target

Abstract

Recently, research has been conducted on nanocomposite thin films containing new additive elements in ZrN. In this paper, a method for depositing ZrCuSiN nanocomposite coatings using a ZrCuSi single target is presented. The ZrCuSi target that was used to easily deposit a ZrCuSiN coating in a mixed gas atmosphere (Ar + N2) was produced by a simple arc melting method (casting process). The effect of the nitrogen content was investigated by depositing a ZrCuSiN coating using alloy targets at various nitrogen gas flow rates (2, 4, 6, and 8 sccm). X-ray diffraction analysis of the ZrCuSiN coatings revealed a ZrN structure with a preferable orientation (200). As the nitrogen flow rate increased, the formation of o-Zr3N4 was dominant in the ZrN formation. A nitrogen gas flow rate of 4 sccm produced a coating with optimal ZrN and a-Si3N4 coordination and maximum hardness (41 GPa). Reciprocal friction tests of all coatings and uncoated carburized SCM415 steel in a 5W30 lubrication atmosphere demonstrated that the 4 sccm coating had the lowest friction coefficient (0.002). Therefore, our method has the potential to be an alternative surface coating technique for materials used in automotive engine parts and various other wear protection applications.