Dual‐mode microwave/radio frequency plasma deposition of dielectric thin films
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.101566
Reference10 articles.
1. Effect of frequency from 'low frequency' to microwave on the plasma deposition of thin films
2. Comparison of microwave and lower frequency plasmas for thin film deposition and etching
3. Plasma-Assisted Etching in Microfabrication
4. Plasma deposition and properties of composite metal/polymer and metal/hard carbon films
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