Extreme ultraviolet emission and confinement of tin plasmas in the presence of a magnetic field
Author:
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4879825
Reference44 articles.
1. Tin laser-produced plasma source modeling at 13.5nm for extreme ultraviolet lithography
2. Simplified one-dimensional calculation of 13.5 nm emission in a tin plasma including radiation transport
3. Heating dynamics and extreme ultraviolet radiation emission of laser-produced Sn plasmas
4. Enhancement of extreme ultraviolet emission from a CO2 laser-produced Sn plasma using a cavity target
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