Simplified one-dimensional calculation of 13.5 nm emission in a tin plasma including radiation transport
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3264692
Reference43 articles.
1. New laser plasma source for extreme-ultraviolet lithography
2. X-ray plasma source design simulations
3. Conversion efficiency of a laser-produced Sn plasma at 13.5 nm, simulated with a one-dimensional hydrodynamic model and treated as a multi-component blackbody
4. Diagnostics for laser plasma EUV sources
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