Laser‐induced chemical vapor deposition of polycrystalline Si from SiCl4
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.91377
Reference8 articles.
1. Chemical Vapor Deposition of Electronic Materials
2. Chemical vapor deposition of silicon using a CO2laser
3. Laser photodeposition of metal films with microscopic features
4. Laser‐induced vapor deposition of silicon
5. General Equations for Gas Phase Compositions in Epitaxial Flow Systems
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