Laser‐induced vapor deposition of silicon
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.91230
Reference5 articles.
1. The Vibration-Rotation Spectrum of SiH4
2. Measurement and analysis of the ν4 band of silane
3. Chemical vapor deposition of silicon using a CO2laser
4. Infrared laser photochemistry of silane
5. Transition probability in molecular encounters. Part 5.—Vibrational-rotational energy transfer
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