Improvement in C-V characteristics of Ge metal-oxide semiconductor capacitor by H2O2 incorporated HCl pretreatment
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2857477
Reference20 articles.
1. Surface oxidation states of germanium
2. Distinctly different thermal decomposition pathways of ultrathin oxide layer on Ge and Si surfaces
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3. Electrical properties of magnesium oxide layers with different surface pretreatment on high mobility Ge1−xSnx and Ge MOS capacitors;Applied Surface Science;2014-02
4. Evolution of the Al2O3/Ge(100) interface for reactively sputter-deposited films submitted to postdeposition anneals;Applied Surface Science;2012-05
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