Microphotoluminescence evaluation of local strain for freestanding Si membranes with SiN deposition
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2825271
Reference11 articles.
1. A novel lateral bipolar transistor with 67 GHz f/sub max/ on thin-film SOI for RF analog applications
2. GaN nanoindentation: A micro-Raman spectroscopy study of local strain fields
3. Local strain in SiGe/Si heterostructures analyzed by X-ray microdiffraction
4. Photoluminescence characterization of strained Si-SiGe-on-insulator wafers with different Ge fractions
5. New Radiative Recombination Processes Involving Neutral Donors and Acceptors in Silicon and Germanium
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1. Acoustic Phonons in Ultrathin Free-Standing Silicon Membranes;Silicon Nanomembranes;2016-04-08
2. Thermal Energy Harvesting;Beyond-CMOS Nanodevices 1;2014-06-03
3. Ultra-thin free-standing single crystalline silicon membranes with strain control;Applied Physics Letters;2013-05-13
4. Length-scale dependence of elastic strain from scattering measurements in metallic glasses;Physical Review B;2012-06-11
5. Measurement of strain and strain relaxation in free-standing Si membranes by convergent beam electron diffraction and finite element method;Acta Materialia;2011-04
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