Ultra-thin free-standing single crystalline silicon membranes with strain control
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4807130
Reference24 articles.
1. Silicon-on-Insulator Technology: Materials to VLSI
2. A review of MEMS oscillators for frequency reference and timing applications
3. Optomechanical crystals
4. Mapping the optical properties of slab-type two-dimensional photonic crystal waveguides
5. Silicon Thin Films as Anodes for High-Performance Lithium-Ion Batteries with Effective Stress Relaxation
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