High tunability (Ba,Sr)TiO3 thin films grown on atomic layer deposited TiO2 and Ta2O5 buffer layers
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1821656
Reference8 articles.
1. A new high performance phase shifter using Ba/sub x/Sr/sub 1-x/TiO3 thin films
2. Characterization of Ni-Doped BST Thin Films on LSCO Buffer Layers Prepared by Pulsed Laser Deposition
3. Silicon substrate integrated high Q-factor parallel-plate ferroelectric varactors for microwave/millimeterwave applications
4. Evaluation of Ta2O5 as a buffer layer film for integration of microwave tunable Ba1−xSrxTiO3 based thin films with silicon substrates
5. Real-time observations of interface formation for barium strontium titanate films on silicon
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