Author:
Hou Shuang,Li Xiuneng,Ma Yijian,Tang Jianfu,Wu Xujing
Abstract
Abstract
Pb0.3Sr0.7TiO3(PST) and Bi1.5Zn0.5Nb0.5Ti1.5O7 (BZNT) thin films were deposited on Pt/Ti/SiO2/Si substrates by Sol-gel and radio frequency (rf) magnetron sputtering, respectively. The dielectric and tunable properties of thin films were investigated as a function of heat treatment processes. It’s found that the heat treatment process at the appropriate temperature and time can be used to obtain a good thin film. The film has the best comprehensive dielectric properties by annealing at 650°C for 45min, the figure of merit (FOM) is 20.1.
Subject
General Physics and Astronomy
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