Silicon dioxide thin films prepared by chemical vapor deposition from tetrakis (dimethylamino)silane and ozone
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.109965
Reference3 articles.
1. Silicon Dioxide Thin Films Prepared by Chemical Vapor Deposition from Silicon Tetraacetate
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