Plasma deposition and characterization of photoluminescent fluorinated nanocrystalline silicon films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.363641
Reference11 articles.
1. Silicon quantum wire array fabrication by electrochemical and chemical dissolution of wafers
2. Plasma deposition of microcrystalline silicon: the selective etching model
3. Photoluminescence from nanocrystallites embedded in hydrogenated amorphous silicon films prepared by plasma enhanced chemical vapor deposition
4. Visible Photoluminescence in Highly Photoconductive Hydrogenated Amorphous Silicon Deposited by Glow Discharge ofSiH4Highly Diluted with He
5. Visible photoluminescence from hydrogenated silicon particles suspended in a silane plasma
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