Author:
Vanhellemont J.,Bender H.,Wu M. F.,De Wachter J.,Hendrickx P.,Pattyn H.,Van Bavel A. M.,Langouche G.,Maenhoudt M.,Bruynseraede Y.
Subject
Physics and Astronomy (miscellaneous)
Cited by
12 articles.
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1. Materials Processing;Ion Beams in Materials Processing and Analysis;2012
2. An investigation of annealing effect on forming nickel disilicide by ion beam synthesis;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2005-12
3. Low-temperature epitaxial Ni silicidation: The role of hyperthermal species;The Journal of Chemical Physics;2005-06
4. Formation of nickel disilicide using nickel implantation and rapid thermal annealing;Journal of Electronic Materials;2003-10
5. Temperature and angular effects on the channelled implantation of Er into;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2001-04