Microstructure of buried CoSi2 layers formed by high‐dose Co implantation into (100) and (111) Si substrates
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.349288
Reference53 articles.
1. Transistor action in Si/CoSi2/Si heterostructures
2. Control of a natural permeable CoSi2base transistor
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5. Summary Abstract: Control of pinhole formation in epitaxial CoSi2 films
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