Fabrication of high quality multilayer blazed gratings using ion beam assisted deposition
Author:
Affiliation:
1. Department of Physics, Colorado State University, Fort Collins, Colorado 80523, USA
Funder
National Science Foundation (NSF)
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4984916
Reference42 articles.
1. High-efficiency 5000 lines/mm multilayer-coated blazed grating for extreme ultraviolet wavelengths
2. Conformal growth of Mo/Si multilayers on grating substrates using collimated ion beam sputtering
3. Control of surface mobility for conformal deposition of Mo–Si multilayers on saw-tooth substrates
4. Enhancement of diffraction efficiency via higher-order operation of a multilayer blazed grating
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