Enhancement of diffraction efficiency via higher-order operation of a multilayer blazed grating
Author:
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference12 articles.
1. Performance of a tungsten/carbon multilayer-coated, blazed grating from 150 to 1700 eV
2. Resonant inelastic x-ray scattering spectra for electrons in solids
3. Theoretical efficiency analysis of a condenser-embedded grating-based spectral purity filter for EUV lithography
4. Infrared diffractive filtering for extreme ultraviolet multilayer Bragg reflectors
5. Record high extreme-ultraviolet efficiency at near-normal incidence from a multilayer-coated polymer-overcoated blazed ion-etched holographic grating
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3. Experimental study and modeling of extreme ultraviolet 4000 lines/mm diffraction gratings coated with periodic and aperiodic Al/Mo/SiC multilayers;Applied Optics;2023-12-21
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