Record high extreme-ultraviolet efficiency at near-normal incidence from a multilayer-coated polymer-overcoated blazed ion-etched holographic grating
Author:
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference12 articles.
1. Efficiency and long-term stability of a multilayer-coated, ion-etched blazed holographic grating in the 125–133-Å wavelength region
2. Polarization and efficiency of a concave multilayer grating in the 135–250-Å region and in normal-incidence and Seya–Namioka mounts
3. Efficiency of a multilayer-coated, ion-etched laminar holographic grating in the 145–160-nm wavelength region
4. Efficiency calibration of the first multilayer-coated holographic ion-etched flight grating for a sounding rocket high-resolution spectrometer
5. Efficiency calibration of the four multilayer-coated holographic ion-etched flight gratings for a sounding rocket high-resolution spectrometer
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