Simulation study of three-dimensional grayscale ice lithography on amorphous solid water for blazed gratings-Reference-Cited by-同舟云学术

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Simulation study of three-dimensional grayscale ice lithography on amorphous solid water for blazed gratings

Published:2024-01 Issue: Volume:284-285 Page:112129
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Guo Jinyu,Tian Shuoqiu,Yuan Wentao,Tong Xujie,Zheng Rui,Wu Shan,Zhao Ding,Chen Yifang,Qiu Min

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference25 articles.

1. Application of precision diamond machining to the manufacture of micro-photonics components;Davies,2003

2. Investigation on the viscoelasticity of optical glass in ultraprecision lens molding process;Zhou;J. Mater. Process. Technol.,2009

3. Recent advancements in optical microstructure fabrication through glass molding process;Zhou;Front. Mech. Eng.,2017

4. Grating efficiency theory as it applies to blazed and holographic gratings;Loewen;Appl. Opt.,1977

5. Fabrication of high quality multilayer blazed gratings using ion beam assisted deposition;Harrison;J. Appl. Phys.,2017

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