Comparison of electron cyclotron resonance plasma characteristics discharged by 7.0, 8.0, and 9.4 GHz
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1150315
Reference6 articles.
1. Electron and ion energies in plasmas generated by the electron‐cyclotron‐resonance mechanism
2. Comparison between a two-dimensional simulation and a global conservation model for a compact ECR plasma source
3. Electric Probe Measurements in an ECR Plasma CVD Apparatus
4. Electron cyclotron resonance plasmas excited by rectangular and circular microwave modes
5. Compact electron cyclotron resonance ion source with a permanent magnet
Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Characteristics of plasmas in a compact ion source using high-frequency microwave electron cyclotron resonance;Review of Scientific Instruments;2002-02
2. Effect of discharge microwave frequency on electron temperature of electron cyclotron resonance plasma;Review of Scientific Instruments;2001
3. Electron temperature, density, and metastable-atom density of argon electron–cyclotron-resonance plasma discharged by 7.0, 8.0, and 9.4 GHz microwaves;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2000
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