Compact electron cyclotron resonance ion source with a permanent magnet
Author:
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://avs.scitation.org/doi/pdf/10.1116/1.578545
Cited by 9 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Review of the Cutoff Problem;Compact Plasma and Focused Ion Beams;2013-11-20
2. A New High-Performance Ion Source Based on Magnetically Neutral Loop Discharge;Japanese Journal of Applied Physics;2010-11-22
3. Effect of unintentionally introduced oxygen on the electron–cyclotron resonance chemical-vapor deposition of SiNX films;Journal of Applied Physics;2002-07
4. Production of pulsed microwave plasma in a tube with a radius below the cut-off value;Journal of Physics D: Applied Physics;2000-04-07
5. Comparison of electron cyclotron resonance plasma characteristics discharged by 7.0, 8.0, and 9.4 GHz;Review of Scientific Instruments;2000-02
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