Quantitative analysis of ultra thin layer growth by time-of-flight low energy ion scattering
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Reference11 articles.
1. Surface and Thin Film Analysis, edited by H. Bubert and H. Jenett (Wiley-VCH, Weinheim, 2002), p. 150.
2. Surface composition analysis by low-energy ion scattering
3. Comprehensive study of the surface peak in charge-integrated low-energy ion scattering spectra
4. Pulsed ion beam surface analysis as a means of in situ real‐time analysis of thin films during growth
5. Temperature dependence of flat Ge/Si(0 0 1) heterostructures as observed by CAICISS
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