Towards higher stability of resonant absorption measurements in pulsed plasmas
Author:
Affiliation:
1. Chimie des Interactions Plasma Surface (ChIPS), CIRMAP, Université de Mons, 23 Place du Parc, B-7000 Mons, Belgium
2. Materia Nova Research Center, Parc Initialis, B-7000 Mons, Belgium
Funder
Fonds De La Recherche Scientifique - FNRS (F.R.S. - FNRS)
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4938250
Reference18 articles.
1. Optical diagnostics of d.c. and r.f. argon magnetron discharges
2. Study of the transport of titanium neutrals and ions in the post-discharge of a high power pulsed magnetron sputtering device
3. Spatial characterization of Ar–Ti plasma in a magnetron sputtering system using emission and absorption spectroscopy
4. Titanium density analysed by optical absorption and emission spectroscopy in a dc magnetron discharge
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