Electrical characterization of the flowing afterglow of N2 and N2/O2 microwave plasmas at reduced pressure
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4872468
Reference41 articles.
1. Effect of Plasma Nitriding Parameters on the Wear Behaviour of AISI D6 Tool Steel
2. ECR Microwave plasma-nitriding of AISI H-12 steel
3. Sterilization/disinfection of medical devices using plasma: the flowing afterglow of the reduced-pressure N2-O2discharge as the inactivating medium
4. Functionalization of Carbon Nanotubes via Nitrogen Glow Discharge
5. AlGaN/GaN heterojunction field effect transistors grown by nitrogen plasma assisted molecular beam epitaxy
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