Subject
Physics and Astronomy (miscellaneous)
Cited by
59 articles.
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1. Point Defects and Diffusion in Semiconductors;Handbook of Solid State Diffusion, Volume 1;2017
2. Role of Defects in the Dopant Diffusion in Si;Semiconductors and Semimetals;2015
3. Metal silicides in advanced complementary metal-oxide-semiconductor (CMOS) technology;Metallic Films for Electronic, Optical and Magnetic Applications;2014
4. Point Defects, Diffusion, and Precipitation;Materials Science and Technology;2013-02-15
5. Dopants;Computational Microelectronics;2004