Channeling and diffusion in dry-etch damage
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.366028
Reference25 articles.
1. Raman scattering of coupled longitudinal optical phonon‐plasmon modes in dry etchedn+‐GaAs
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3. Evaluation of dry etch damage in nano-structures by direct transmission electron microscopic examination
4. Effects of dry etching on GaAs
5. Characterization of subsurface damage in GaAs processed by Ga+focused ion‐beam‐assisted Cl2etching using photoluminescence
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