Author:
Engel P. M.,de Souza J. P.
Subject
General Physics and Astronomy
Cited by
3 articles.
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1. Irradiation effects of proton bombarded poly-Si/SiO2/Si structure;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2004-06
2. Iron contamination in silicon technology;Applied Physics A: Materials Science & Processing;2000-05-01
3. Gettering in silicon;Journal of Applied Physics;1989-04-15